Process Engineer - Ion Implant

axcelis· Axcelis Technologies, Inc.
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📍 Beverly, MAFull time💰 USD 68K–102K
Full timeAxcelis Technologies, Inc.

About this role

JOB DESCRIPTION

Process Engineer – Ion Implant

Role Summary

The Process Engineer supports the characterization, documentation, and application of ion implant equipment to meet customer and product requirements. They act as the internal customer interfacing with engineering, marketing and field teams to support the development and release of products and upgrades.  This role focuses on executing tool characterization activities, analyzing tool performance data, supporting customer engagements and demonstrations, and collaborating with cross‑functional teams under established technical direction.

1. Tool Characterization and Operational Support

  • Support the definition and maintenance of the operational parameter space of ion implant tools based on established technical requirements and customer use cases.
  • Define and execute characterization plans to evaluate tool performance across defined operating conditions.
  • Assist in identifying gaps in characterization data and documentation and contribute to plans to close those gaps.
  • Generate and maintain data packages describing the current operational window of assigned tool sets based on released machine specifications.
  • Organize and update characterization data, reports, and Best Method documentation for internal teams, marketing, and customer-facing groups.
  • Support evaluation of new hardware or procedural changes and assist with required characterization and documentation updates.

2. Customer Installed-Base Support

  • Collect and maintain information related to installed customer tools, including process applications, technology nodes, and production status.
  • Gather and analyze tool performance data such as repeatability, stability, particle performance, uptime, and SPC-related metrics.
  • Document performance trends and observations for internal review.
  • Support customer interactions to identify tool performance concerns or process limitations requiring further analysis or characterization.

3. Equipment Demonstration Lab Support

  • Assist Systems Engineers and Equipment Engineers with customer tool demonstrations.
  • Review customer technical requirements and support feasibility assessments under guidance.
  • Provide hands-on support for recipe setup, wafer processing, and system qualification prior to customer wafer runs.
  • Help ensure tool operation aligns with defined demonstration requirements.
  • Contribute to preparation and distribution of customer demonstration reports and assist with follow-up actions.

4. Cross-Functional Collaboration

  • Work with Marketing, Systems Engineering, and Engineering teams to communicate characterization results and tool performance findings.
  • Support documentation and updates to operating specifications for new processes, applications, or tool configurations.
  • Assist with collection and organization of competitive performance data to support product positioning efforts.
  • Communicate findings, issues, and improvement opportunities clearly to internal stakeholders.

5. Application Support and Development

  • Support identification of new tool applications through customer feedback, marketing input, and technical literature review.
  • Participate in joint development or evaluation activities with customers under defined project scope.
  • Assist internal engineering teams with data collection and analysis required for hardware or software upgrades.
  • Share application and characterization results with relevant internal teams.

Qualifications & Skills

  • Bachelor’s degree in Electrical Engineering, Physics, Materials Science, Chemical Engineering, or related field.
  • 0–3 years of experience in semiconductor processing, equipment engineering, or related technical role.
  • Familiarity with ion implant concepts (dose, energy, species, uniformity) or other semiconductor process tools is a plus.
  • Basic understanding of SPC, data analysis, and experimental methodology. Also ability to program basic engineering functions in JMP, Minitab, Matlab is a plus.
  • Ability to document technical results clearly and communicate effectively with cross‑functional teams.
  • Willingness to learn hands‑on tool operation and support customer-facing activities.

EQUAL OPPORTUNITY STATEMENT


It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law.  Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
 

U.S. BASE SALARY RANGE

$67,812.80 - $101,719.20

This base salary range reflects the typical compensation for this role across U.S. locations.

Our salary ranges are determined by role and level; individual pay is determined based on

multiple factors, including job-related skills, experience, relevant education or training, work

location, and internal equity. The range provides the opportunity for growth and progression as

you develop within the role.

Base pay is one part of our U.S. total compensation package which includes eligibility in the

Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular

employees working 20+ hours a week).

Frequently Asked Questions

What is the salary for the Process Engineer - Ion Implant role at axcelis?
The listed salary for this Process Engineer - Ion Implant position at axcelis is USD 68K–102K. This is an Full time role.
Where is the Process Engineer - Ion Implant position at axcelis located?
This Process Engineer - Ion Implant role at axcelis is based in Beverly, MA. The position is listed as on-site or hybrid. Check the full job description or apply directly to confirm the work arrangement.
Is the Process Engineer - Ion Implant role at axcelis full-time or part-time?
This is listed as a Full time position. It is posted as a Process Engineer - Ion Implant role in the Axcelis Technologies, Inc. department at axcelis.
Which team or department does the Process Engineer - Ion Implant at axcelis belong to?
This Process Engineer - Ion Implant position is part of the Axcelis Technologies, Inc. department at axcelis. See the full job description for more information about the team structure and responsibilities.
How do I apply for the Process Engineer - Ion Implant position at axcelis?
Click the "Apply Now" button on this page. You will be redirected to axcelis's official application portal hosted on workday where you can submit your application directly.
Process Engineer - Ion Implant
axcelis · 💰 USD 68K–102K
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